Fabrication of multi-level 3-dimension microstructures by phase inversion process
نویسندگان
چکیده
منابع مشابه
Fabrication of multi-layer SU-8 microstructures
The fabrication of multi-level SU-8 microstructures using multiple coating and exposure steps and a single developing step has been achieved for up to six layers of SU-8. Alternating layers of SU-8 2010 (thin) and SU-8 2100 (thick) photoresist films were spin coated, followed by soft-bake, ultraviolet (UV) exposure and post-exposure bake steps. The multiple SU-8 layers were simultaneously devel...
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ژورنال
عنوان ژورنال: Nano-Micro Letters
سال: 2010
ISSN: 2311-6706,2150-5551
DOI: 10.1007/bf03353625